【摘 要】
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Background,Motivation and Objective Capacitive micro-machined ultrasonic transducers (CMUTs), as an alternative of conventional piezoelectric transducers, have various advantages such as superior imag
【机 构】
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Hitachi, Ltd., Tokyo, Japan Hitachi Aloka Medical
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Background,Motivation and Objective Capacitive micro-machined ultrasonic transducers (CMUTs), as an alternative of conventional piezoelectric transducers, have various advantages such as superior imaging quality and potential capability of circuit integration. However, CMUTs are hardly operated at high voltage to generate enough ultrasound power because the electrical charging effect of dielectrics in the CMUT cell degrades the receiving sensitivity after a long term operation.
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