【摘 要】
：
In recent years, the performances of gyroscopes and accelerometers manufactured by the Micro-Electro-Mechanical System (MEMS) technology have been continuou
【机 构】
：
清华大学精密仪器系北京100084;精密测试技术及仪器国家重点实验室北京100084;;地下目标毁伤技术国防重点学科实验室中北大学太原030051清华大学精密仪器系北京100084;精密测试技术及仪器
【出 处】
：
中国仪器仪表学会第十六届青年学术会议
论文部分内容阅读
In recent years, the performances of gyroscopes and accelerometers manufactured by the Micro-Electro-Mechanical System (MEMS) technology have been continuously improved with prominent advantages of small volume, light weight and so on.Generally, MEMS inertial measurement units (MEMS IMU) consist of three-axis MEMS gyroscopes and three-axis MEMS accelerometers and have been gradually applied in strapdown inertial navigation systems in different situations, especially in tactical level navigation system and GPS/INS combined navigation system [1].However, the silicon which is the main composition material of MEMS IMU is sensitive to temperature, and at the same time, other circuit element features also change with the environmental temperature, therefor the temperature variation has a great influence on the bias of MEMS IMU.In inertial navigation, with the increase of time, the error caused by temperature will be on the rise rapidly without compensation.
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