论文部分内容阅读
Improvement of the linearity of a capacitive pressure sensor with a new structure
【机 构】
:
Pen-Tung Sah MEMS Research Center,Xiamen University,Xiamen,Fujian,CHINA
【出 处】
:
中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of th
【发表日期】
:
2008年12期
其他文献
会议
In recent years portability and versatility have become more and more important,resulting in the demand for smaller,multifunctional,and more complex products.Tool manufacturing for mass-production of
会议