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阐述了AlN陶瓷的烧结原理 ,分析了烧结工艺参数对大面积AlN基板性能的影响 ,成功研制出了高热导率(190W /m·K)、大面积 (14 0mm× 90mm)、翘曲度为 2 0 μm/5 0mm的AlN陶瓷基板。
The sintering principle of AlN ceramics was expounded. The influence of sintering parameters on the performance of AlN substrate was analyzed. High thermal conductivity (190W / m · K), large area (140mm × 90mm) 2 0 μm / 50 mm AlN ceramic substrate.