【摘 要】
：
The Lithium phosphorus oxynitride (LiPON) films have been prepared by Radio frequency (RF)magnetron sputtering.The different nitrogen content on the surface of LiPON film was regulated by controlling
【机 构】
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China Building Materials Academy, Beijing 100024, China
【出 处】
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The 24th International Conference on Glass( ICG Congress 201
论文部分内容阅读
The Lithium phosphorus oxynitride (LiPON) films have been prepared by Radio frequency (RF)magnetron sputtering.The different nitrogen content on the surface of LiPON film was regulated by controlling the flow of nitrogen, for the purpose to investigate the influence of nitrogen content on the interface of ITO/LiPON/ITO blocking electrode..
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