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Recently,there have been many research for higher deposition rate (DR) and good uniformity of μc-Si:H film in large-area discharge.
An experimental study on a large area multi-electrode discharge in the fabrication of microcrystalli
【摘 要】
：
Recently,there have been many research for higher deposition rate (DR) and good uniformity of μc-Si:H film in large-area discharge.
【机 构】
：
Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon, South Korea305-7
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
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