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The airflow induced by a moving automatic guided vehicle (AGV) in a cleanroom is studiednumerically in this research. A parallelized characteristic curve method is employed and the stiffnessmatrix is made symmetric, an incomplete balancing domain decomposition preconditioned conjugategradient method is utilized to solve the interface problem of the domain decomposition system. Therecirculation zones in flow pattern cause difficulties to remove the micro contaminants andhazardous gas, and the model is built in three dimensional. Numerical results show that more detailsare revealed by non-stationary large scale simulations, and that boundary layers affect the airflowpattern and more recirculation zones appear around the AGV.