As hotter objects emit more thermal energy than colder ones,infrared thermography attracted many military or civil interests of providing thermal temperature images.Most infrared camera on the market is actually an infrared telescope that could be used to see large object such as building or vehicle from far distance.This paper will introduce a homemade infrared microscope that could provide high quality thermal image analysis of very small object in micrometer scale.Our thermal microscope uses the middle range infrared spectrum (8-14 m wavelength) detector with UIS infrared optical lens that offer a wide range of optical magnifications from 0.5×,1×,3×,5× and 1O×.After revealing its hardware and software capabilities,we will report some actual measurements from 1C chips,MEMS hot plate to cancer optothermal treatment,etc.In order to calibrate the temperature measurement accuracy,we have developed a novel active calibration system basing on a micro-fabricated hot plate.