Presently,gas flow meters based on so-called thermal flow microsensors became a frequent practice [1,2].Gas flow meters are used in chemical and electronic industries,medical and aerospace applications,air conditioning and ventilation as well as in other fields.Gas flow meters are implemented in micro total analysis system (μTAS) which recently has been significantly developed.The study is a follow up of our previous research [3].The main result of the research is a calorimetric flow microsensor prototype with optimal functional and technological characteristics.