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In this study,Lithium fluoride (LiF) buffer layer was inserted between pentacene active layer and Au source/drain electrodes of the organic thin-film transistors (OTFTs).Due to the reducement of contact resistance using LiF buffer layer,the OTFT devices without and with various LiF buffer layers were fabricated.The effect field-effect mobility was increased from 0.221 to 0.376 cm2/Vs due to the function of 1.0nm-thick LiF buffer layer.