一种牵引分子泵过渡流态抽气性能的计算方法

来源 :中国真空学会2014年年会 | 被引量 : 0次 | 上传用户:cloud0906
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  复合分子泵结合了涡轮分子泵大抽速、牵引分子泵压缩比高的优点,在很宽压力范围内具有优越的性能,已经成为半导体薄膜制备等领域中的重要真空获得设备。随着复合分子泵应用领域的扩宽,其牵引级的工作条件已经由分子流态扩展到过渡流,甚至到了粘滞流态下。牵引分子泵分子流、粘滞流态下的抽气特性计算已有较成熟的方法,其过渡流态下的计算成为复合分子泵设计计算的核心问题。本文以分子流和粘滞流态下牵引泵抽气性能计算式为基本依据,通过引入加权系数的方式,计算过渡流态的抽气性能,其中,加权系数由克努森数决定。相比直接模拟蒙特卡洛方法,本文提出的计算方法具有足够的工程计算精度,同时还可节省计算时间、提高计算效率。
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