论文部分内容阅读
In-situ Monitoring of the Influence of Inert Gases (Ne,Ar,Kr,Xe) on Plasma Properties and the Growth
【作 者】
:
【机 构】
:
institute of Physics,Academy of Sciences of the Czech Republic,Na Slovance 2,182 21Prague 8,Czech Re
【出 处】
:
The 8th Asian-European International Conference on Plasma Su
【发表日期】
:
2011年1期
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