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New Technique for Fabrication of High Frequency Piezoelectric Micromachined Ultrasonic Transducers
【机 构】
:
Technical University of Denmark, Department of Micro and Nanotechnology, Lyngby, Denmark
【出 处】
:
2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE
【发表日期】
:
2008年1期
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