The effect of substrate position on the microstructure of CVD SiC coating

来源 :第二届中国国际复合材料科技大会 (CCCM-2) | 被引量 : 0次 | 上传用户:reeyung
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  Silicon carbide coatings were fabricated by chemical vapor deposition method using domestic graphite as substrate and methyltrichlorosilance as precursor.Two frock design: drum type and steamer type, were used to constraint the flow and control deposition process.Scanning electron microscopy (SEM) and X-ray diffraction (XRD) were used to characterize the morphology and micro-structure of coatings deposited at different position.
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