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膜层耐磨性能的测量与评价已成为硬质薄膜技术发展与应用的关键问题。球磨技术采用连续回转运动的GCr15轴承钢球带动悬浮液中的金刚石颗粒(直径为1.5μm)对试样进行球磨,通过对“圆环状”磨痕内外圈直径的测量,并利用提出的单位磨损率概念评价其耐磨性。以非平衡磁控溅射/阳极离子束沉积法在SKD11不锈钢基体上制备的Cr/α-C:H多层膜为研究对象,采用球磨法检测耐磨性能,磨球转速为200 r/min(0.26 m·s-1),对试样的压力载荷为0.45 N,球磨圈数在50～800之间。并通过体式显微镜,原子力显微镜以及扫描电镜对薄膜的磨损情况进行表面观察。经对实验数据的分析,球磨圈数350为耐磨临界值,测得Cr/α-C:H膜的单位磨损率δ为8.87×10-9(mm4·mm-2)。结果表明,薄膜在微粒磨损的作用下,其去除机制主要以微切削和犁沟为主。
The measurement and evaluation of wear resistance of the film has become a key issue for the development and application of hard film technology. Ball mill technology GCr15 bearing steel ball with continuous rotary motion drives the diamond particles in the suspension (1.5μm in diameter) to sample the ball mill. Through the measurement of the diameter of the inner ring and the outer ring of the “ring-shaped” wear scar, The unit wear rate concept evaluates its wear resistance. The Cr / α-C: H multilayers prepared by unbalanced magnetron sputtering / anode ion beam deposition on SKD11 stainless steel substrate were used as the research object. The wear resistance was measured by the ball milling method. The rotation speed of the balls was 200 r / min (0.26 m · s-1), the pressure load on the sample is 0.45 N, the number of ball milling between 50 to 800. The surface wear of the film was observed by stereo microscope, atomic force microscope and scanning electron microscope. After analyzing the experimental data, ball wear number 350 is the wear-resistant critical value, and the unit wear rate δ of the Cr / α-C: H film is 8.87 × 10 -9 (mm 4 · mm -2). The results show that the mechanism of particle removal is mainly micro-cutting and furrowing.