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In the working process of semiconductor lasers, catastrophic optical damage (COD) occurs frequently in the laser facets, which has become the main reason to limit the maximum power output.So, the development of a high-performance antireflection coating on the facet is becoming a hotspot in the research of semiconductor lasers.Currently, the conventional materials for AR coatings are used such as SiO2, Al2O3, etc [1,2].