Levitrack is an in-line mass production ALD system for surface passivation.A Si wafer receives one saturated layer of AlOx in one thermal ALD cycle depending on deposition temperature (~0.12 nm at 2000C).ALD aluminum oxide ensures excellent Si surface passivation due to minimization of interface density (Dit) and its high negative surface charge density (Qf).In the PV sector AlOx is widely applied for p-type Si solar cells as a rear dielectric.Its passivation quality was independently demonstrated by several groups [1],[2],[3],[4].Recently it has also been shown that n-type cells with p+ emitters can be effectively passivated by Al2O3 [5],[6].