论文部分内容阅读
A Study of the Surface Chemical Reaction on the Etched IGZO Thin Films by Using Inductively Coupled
【机 构】
:
School of Electrical and Electronics Engineering,Chung-Ang University,221,Heukseok-Dong,Dongjak-Gu,S
【出 处】
:
The 8th Asian-European International Conference on Plasma Su
【发表日期】
:
2011年1期
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