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Native-oxides free high-k interfacesA synchrotron radiation photoemission study
【机 构】
：
NationalSynchrotronRadiationResearchCenter,Hsinchu,Taiwan,R.O.C.Grad.Inst.ofAppl.Phys.andDept.ofPhys
【出 处】
：
第一届国际ALD应用大会暨第二届中国ALD学术交流会
【发表日期】
：
2012年10期
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