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This letter reports on the magnetic properties of the TiO2 films and Au cluster doped TiO2 films fabricated by sol-gel and sputtering methods combined experiments and first-principles calculations. By annealing under air or N2 atmosphere respectively,all the samples exhibit ferromagnetism at room temperature with the crystal phase of anatase.The first principles calculation results show that the formation energy of the oxygen vacancy and Au cluster co-doped TiO2 films is higher than that of Au cluster doped TiO2 films.The effects of the Au cluster dopant retard the formation of surface oxygen vacancy and,at the same time,the electrons were transferred from 3d states of Ti atoms to Au 5d states in Au cluster doped TiO2 films.The co-doping of surface oxygen vacancies,bulk oxygen vacancies and Au clusters led to the spin-split of Ti 3d and O 2p in Au cluster doped TiO2 films(annealed in N2)which yield the highest saturation magnetization.