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Derived from the fabrication of Cu (In,Ga) Se2 in common vacuum method, the selenization of CZTS thin film could be possibly conducted by the rapid thermal process (RTP) treatment of a selenium-coated CZTS thin film. However, the low melting point and high surface tension of selenium compared to those of the CZTS precursor film could lead to an inhomogeneous selenium diffusion into CZTS and blocks the selenization process.