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In this study, a diffusional carbonitriding process was performed to modify the surface of Ti-6AI-4V alloy.Microstructure, phase constituents, hardness and cavitation erosion behavior of the treated samples were investigated.The results indicated that the diffusional carbonitriding can effectively improve the cavitation erosion resistance of Ti-6A1-4V alloy.A hard, dense and uniform ceramic layer formed on the surface of Ti-6A1-4V alloy was responsible for the improvement in cavitation erosion resistance.The carbonitriding temperature has a slightly effect on the cavitation erosion resistance of the treated samples.Based on the observation of surface morphology of the eroded samples, the cavitation erosion mechanism of the ceramic layer was brittle fracture.