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This paper demonstrates a noval electro-thermal micro actuator design,fabrication and device tests that combines microfluidic technology and microsolidics process.A three-dimensional solenoid microchannel with high aspect ratio was fabricated simultaneously inside silica glass by an improved femtosecond laser wet etch(FLWE)technology,the diameter of spiral coil is only 200 μm.Molten alloy(Bi/In/Sn/Pb)with high melting point was injected into the three-dimensional solenoid microchannel inside silica glass and solidified to form a electro-thermal micro actuator.The device is capable of achieving precise temperature control and quick response,and can be also easily integrated into MEMS,sensors and lab on a chip(LOC)platform inside fused silica substrate.