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5. Plasma Recovery in Plasma Immersion Ion Implantation for a Planar Target Modification by a Fluid Dif

Plasma Recovery in Plasma Immersion Ion Implantation for a Planar Target Modification by a Fluid Dif

来源 :The 8th Asian-European International Conference on Plasma Su | 被引量 : 0次 | 上传用户：ZQF1234

【作 者】

：

Y.Li B.C.Zheng M.K.Lei 

【机 构】

：

Surface Engineering Laboratory,School of Materials Science and Engineering,Dalian University of Tech

【出 处】

：

The 8th Asian-European International Conference on Plasma Su

【发表日期】

：

2011年1期

【关键词】

：

Plasma immersion ion implantation Plasma diffusion Fluid diffusion model Surface 

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