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5. Characterization and Properties of Ti-Al-N Coatings Deposited by Ion Source Enhanced Middle Frequenc

Characterization and Properties of Ti-Al-N Coatings Deposited by Ion Source Enhanced Middle Frequenc

来源 :The 17th International Conference on Surface Modification of | 被引量 : 0次 | 上传用户：jenny18

【作 者】

：

C.W.Zou L.X.Shao D.J.Fu 

【机 构】

：

Department of Physics and Development Center for New Materials Engineering & Technology in Universit

【出 处】

：

The 17th International Conference on Surface Modification of

【发表日期】

：

2011年3期

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