【摘 要】
：
Ti1-xAlxN (0.25≤x≤0.75) coatings were deposited on stainless steel (SS) and Si wafers by reactive DC/RF magnetron co-sputtering.The microstructure,morphol
【机 构】
：
Energy Materials & Technology Research Institute,General Research Institute for Non-ferrous Metals,B
【出 处】
：
第四届国际表面与界面科学与工程学术会议(The Fourth International Conference on S
论文部分内容阅读
Ti1-xAlxN (0.25≤x≤0.75) coatings were deposited on stainless steel (SS) and Si wafers by reactive DC/RF magnetron co-sputtering.The microstructure,morphology,surface roughness and chemical composition were investigated by X-ray diffraction (XRD),field emission scanning electron microscope (FE-SEM),atom force microscopy (AFM) and energy dispersive spectrum (EDS),respectively.The anti-oxidation in high temperature was also studied.The result showed that the coating deposited with high AI/Ti atom ratio (x≥0.5) exhibited the phase of hexagonai-AlN and cubic-TiAlN,while with low Al/Ti atom ratio (x<0.5) had the cubic-TiAlN structure.The surface of Ti1-xAlxN coatings had the roughness of 1.89~ 4.80nm and the more Al content,the smoother.All the coatings deposited with different Al/Ti atom ratio had column structure.Ti1-xAlxN coatings became more stable with increasing the Al content,and Ti25Al75N coatings was stable up to 900℃ in air.
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