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Using glasses as substrates is a promising way to lower the cost of thin film solar cells.High purity argon diluted silane(SiH4)and H2 were used as resource gases.Si-(111)preferential orientation polycrystalline silicon film was directly deposited at less than 200℃on glasses in a DC-biased compact electron cyclotron resonance enhanced chemical vapour deposition(ECR-PECVD)system.