【摘 要】
：
Ellipsometry has been proved as an extremely useful tool to study the optical properties of many kinds of materials with high optical data precision in meas
【机 构】
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Fudan University, China
【出 处】
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The 9th International Conference on Thin Film Physics and Ap
论文部分内容阅读
Ellipsometry has been proved as an extremely useful tool to study the optical properties of many kinds of materials with high optical data precision in measurement.Being accurate, fast and non-destructive in data acquisition and characterization of the samples, ellipsometry has been widely applied especially in the scientific research labs and microelectronic industry.
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