The study of the structure and properties of TiO2 film prepared by APCVD with a movable inject

来源 :The 24th International Conference on Glass( ICG Congress 201 | 被引量 : 0次 | 上传用户：liuxc1112

【摘要】

：

TiO2 films have been deposited on clear glass by an atmospheric pressure chemical vapor deposition method with a movable inject at various relative speeds to simulate industrial production conditions.

【作者】

：

LIU Xin Yuan Guang-zhong LIU Yong SONG Chen-lu HAN Gao-rong

【机构】

：

State Key Laboratory of Silicon Materials and School of Materials Science and Engineering, Zhejiang

【出处】

：

The 24th International Conference on Glass( ICG Congress 201

【发表日期】

：

2016年11期

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The study of the structure and properties of TiO2 film prepared by APCVD with a movable inject

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