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Displays in mobile phones, tablets and TVs are moving into higher mobility TFT for better performance. LTPS (low-temperature poly-silicon) TFT and metal oxide TFT are the two major directions for high-performance TFT. AKT developed advanced PECVD technology for both LTPS and metal oxide TFT. Plasma density, gas distribution across the entire large-area substrate have been inproved with inovative technologies. These enabled ~5％ film thickness uniformity and excellent film property uniformity. These technologies also allow for higher deposition rate films and high gas utilization. For metal oxide TFT, film performance was also verified through AKT lab TFT integration test.