A misalignment insensitive phase retrieval method and its application in optical surface metrology

来源 :LIMIS 2016——The 4th International Symposium on Laser Interac | 被引量 : 0次 | 上传用户：water15

【摘要】

：

　　Due to the unnecessary introduction of reference beam,phase retrieval based on the optical field diffraction propagation always relate to a simple,compactai

【作者】

：

Fa Zeng Wanjun Dai Dongxia Hu Qiaofeng Tan

【机构】

：

ResearchCenterofLaserFusion,ChinaAcademyofEngineeringPhysics,Mianyang,Sichuan621900,ChinaStateKeyLab

【出处】

：

LIMIS 2016——The 4th International Symposium on Laser Interac

【发表日期】

：

2016年11期

【关键词】

：

phase retrieval optical surface metrology misalignment

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　　Due to the unnecessary introduction of reference beam,phase retrieval based on the optical field diffraction propagation always relate to a simple,compactaind stable experimental setup.

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A misalignment insensitive phase retrieval method and its application in optical surface metrology

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