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A new technique of harmless treatment of hazardous solid wastes and preparation silicon monoxide (SiO) with high purity from it simultaneously via thermal plasma was proposed according to calculation and analysis of equilibrium composition for research system.Silicon monoxide power production was prepared with new experimental setup designed and fabricated by authors, which indicates it is an alternative route to prepare silicon monoxide with high purity using novel production method at low cost.Silicon monoxide with high purity and different color could be obtained at elevated conditions such as cooling temperature under vacuum atmosphere from power production prepared previous to meet industrial applications.