A Wet Process for Polyimide Metallization Using Cu and Ni as Seed Layers

来源 :The 60th Annual Meeting of The International Society of Elec | 被引量 : 0次 | 上传用户:qdmark
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  Flexible printed circuit boards are used in many electronic products such as notebook and mobile phones because of its good physicochemical properties.The most attractive flexible substrate,polyimide (PI),has good thermal stability,chemical resistance,ease of processing and low dielectric constant.Nowadays,many dry processes have been applied for metal coating on PI,like sputtering and CVD.These nano-metallic particles serve as seed layers for following copper electroless deposition or electroplating.
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Through-silicon-via (TSV) technology has been employed for three-dimensional (3D) packaging of multi-chips.It can offer short interconnection and reduced signal delays.Copper has been selected as the
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