Vibration switches of primary resonance comb drive MEMS resonators

来源 :The 5th International Conference on Dynamics, Vibration and | 被引量 : 0次 | 上传用户：liangpask

【摘要】

：

This paper investigates the primary resonance vibration switches of Folded-MEMS comb drive resonators.Dynamic equation of motion considering structure and electrostatic nonlinearities is firstly intro

【作者】

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Jianxin Han Gang Jin Wei Wang Lei Li Qichang Zhang

【机构】

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Tianjin Key Laboratory of High Speed Cutting and Precision Machining, School of Mechanical Engineeri

【出处】

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The 5th International Conference on Dynamics, Vibration and

【发表日期】

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2018年11期

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Vibration switches of primary resonance comb drive MEMS resonators

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