【摘 要】
：
We are reviewing the key features of a newly developed batch wet chemical tool.The basic SILEX Ⅱ system achieves an output of up to 3,000 wph,upscaling of batch size will cover tool capacity up to 600
【机 构】
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Singulus Technologies AG Process Development,Sing
【出 处】
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SNEC 第十届(2016)国际太阳能产业及光伏工程(上海)论坛
论文部分内容阅读
We are reviewing the key features of a newly developed batch wet chemical tool.The basic SILEX Ⅱ system achieves an output of up to 3,000 wph,upscaling of batch size will cover tool capacity up to 6000 wph,running with very low breakage rates down to 0.01% and high process yield.The SILEX Ⅱ CLEANTEX combines common texturing and cleaning steps with advanced cleaning and conditioning processes.Advanced cleaning steps are going to become an indispensable part of existing present and future cell lines as a key for further improvement of cell performance and cost reduction.One of the possibilities to decrease the costs is by doubling the throughput by means of increasing the batch size.The impact of increasing the batch size from 200 wafers to 400 wafers is discussed in this work.
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