Based on the available thermodynamic parameters and experimental data of self-diffusivity,impurity diffusivity,intrinsic diffusivity,tracer diffusivity and interdiffusivity in the Cu-Si,Al-Si and Al-Cu-Si alloys,the atomic mobilities of Cu,Al and Si in face-centered cubic (fcc_A l) Cu-Si,Al-Si and Al-Cu-Si alloys have been critically assessed as a function of temperature and composition using the CALPHAD-type and DICTRA software package.Comparisons between the calculated and measured coefficients reveal that most of the diffusivities can be reproduced satisfactorily.The obtained mobility parameters can be used to study diffusion-related characteristics for fcc_Al Cu-Si,Al-Si and Al-Cu-Si alloys.