【摘 要】
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In this paper,a kind of micro piezoresistive pressuresensor for TPMS was designed.Through analyzing the stress distribution of diaphragm by software ANSYS,t
【机 构】
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State Key Laboratory for Mechanical Manufacturing System,Institute of Precision Engineering,Xi'an J
【出 处】
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中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of th
论文部分内容阅读
In this paper,a kind of micro piezoresistive pressuresensor for TPMS was designed.Through analyzing the stress distribution of diaphragm by software ANSYS,the model of structure was established.The fabrication operated on the single silicon substrate,and applied the technology of anisotropy chemical etching and packaging through glass anodic bonding.Performances of this kind of piezoresistive sensor,including size,sensitivity,temperature coefficient,chemical stability and long-term stability,were investigated.The results showed that the accuracy is 0.5%FS.Therefore,this kind of design reached the desire of the TPMS,not only has smaller size,simplicity preparation and also has high sensitivity,and accuracy.
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