Development of a novel mechanical bearing turbomolecular pump for research,analytical,and coating ap

来源 :第十二届国际真空冶金与表面工程学术会议(ICVMSE2015) | 被引量 : 0次 | 上传用户：alwbgs

【摘要】

：

　　The requirements for turbomolecular pumps in research,analytics,and coating tend towards higher performance,lower cost of owenership,and user friendly integ

【作者】

：

Dieter Mueller

【机构】

：

OerlikonLeyboldVacuumGmbH,BonnerStr.498,D-50968Cologne,Germany

【出处】

：

第十二届国际真空冶金与表面工程学术会议(ICVMSE2015)

【发表日期】

：

2015年8期

【关键词】

：

Turbomolecular Pump New bearing concept New computing methods to optimize rotor/

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　　The requirements for turbomolecular pumps in research,analytics,and coating tend towards higher performance,lower cost of owenership,and user friendly integration in systems and their controls.A new series of mechanical bearing TMPs has been developed.Various parameters influencing the vacuum performance are discussed.The presentation also shows a discussion of existing bearing concepts and an evaluation of advantages/disadvantages.

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Development of a novel mechanical bearing turbomolecular pump for research,analytical,and coating ap

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