The developments of grinding process and nano-/microfine grindingequipments CMOS-MEMS Fabrication:

来源 :第四届微米纳米技术“创新与产业化”国际研讨会暨物联网MEMS产业应用论坛 | 被引量 : 0次 | 上传用户:viclee0716
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  Wet Fine-Grinding Big Equipments refers to Agitator bead-mills with chamber volume ca.100-1000L; and those ones with chamber volume 1000-10,000L can be regarded as Megasized Agitator Mills.These Big Bead-Mill and Megasized Agitator Mills require very special designed structure,high technology and are hard to develop.However, they are so economical in the real production that the prospect is very bright regarding the market in the future.
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