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  5. The investigation of striations in radio-frequency hollow cathode discharge

The investigation of striations in radio-frequency hollow cathode discharge

来源 :13th Asia-Pacific Conference on Plasma Science and Technolog | 被引量 : 0次 | 上传用户：liuyunxiaoyan
【摘 要】
：
Striation discharge phenomenon has been observed at nineteenth century.The striation discharge was normally generated by direct current,high frequency discharge,dielectric barrier discharge and microw
【作 者】
：
Yue Zhang Zhengduo Wang Qiang Chen Jiting Ouyang 
【机 构】
：
Beijing Institute of Technology Beijing, China Be
【出 处】
：
13th Asia-Pacific Conference on Plasma Science and Technolog
【发表日期】
：
2016年10期
【关键词】
：
radio-frequency hollow cathode discharge striation discharge 
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　　Striation discharge phenomenon has been observed at nineteenth century.The striation discharge was normally generated by direct current,high frequency discharge,dielectric barrier discharge and microwave discharge[1-2].Hollow cathode discharge has some unique electrical and optical properties because of its hollow cathode effect.It has been widely applied in spectroscopic analysis,surface treatment,plasma enhanced vacuum deposition,reactive ion etching and so on.Until now there is no report about striation discharge in radio-frequency (RF) hollow cathode discharge (HCD).
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