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Si基纳米材料是近年迅速发展起来的一类新型光电信息材料,在未来的Si发光二极管、Si激光器以及Si基光电子集成技术中具有潜在的重要应用.这些材料主要包括纳米多孔硅,由SiO_2膜、SiO_x（x<2.0）膜与氢化非晶Si（a-Si:H）膜镶嵌或覆盖的Si纳米微粒,Si纳米量子点以及Si/SiO_2超晶格等.目前的研究迹象预示,一旦这些材料能够实现高效率和高稳定度的光致发光（PL）或电致发光（EL）,很有可能在21世纪初引发一场新的信息革命.主要介绍了过去10年中各类Si基纳米材料在制备方法、结构特征和发光特性方面的研究进展,并初步预测了这一研究领域在今后10年内的发展趋势.
Si-based nanomaterials are a new type of optoelectronic information materials developed rapidly in recent years, and have potential applications in the future integration of Si LEDs, Si lasers and Si-based optoelectronics.These materials mainly include nano-porous silicon, , Si nanoparticles embedded in or covered with hydrogenated amorphous Si (a-Si: H) films, Si nano-quantum dots, and Si / SiO 2 superlattices, etc. The present research indicates that once these Materials that achieve high efficiency and high levels of photoluminescence (PL) or electroluminescence (EL) are likely to trigger a new information revolution in the early 2000s, highlighting the various types of Si-based The research progress of nanomaterials in the preparation methods, structural characteristics and luminescence properties, and preliminary forecast of the development trend of this research area in the next 10 years.