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微操作手是微操作机器人的核心部件 ,文章介绍了作者研制的压电陶瓷管驱动三自由度集成式微操作手 ,在此基础上 ,研究了微操作手的位置闭环控制 ,提出了模糊 -比例积分控制方法 ,并通过实验获得了较好的控制效果。通过对微操作手进行动静态测试得到微操作手的性能指标 :操作手末端 X、Y轴的最大输出位移为± 8.5μm,重复定位精度为 2 8nm ,位移分辨率为 10 nm ,动态阶跃响应时间为 5 m s;Z轴最大输出位移为 6 .2μm ,重复定位精度为 17nm,位移分辨率为 4 nm ,动态阶跃响应时间为 5 m s。该微操作手能够实现纳米级微动定位 ,满足微操作要求
The micro-manipulator is the core component of the micro-manipulator. The article introduces the micro-manipulator with three degrees of freedom driven by the piezoelectric ceramic tube driven by the author. Based on this, the position closed-loop control of the micro manipulator is studied and the fuzzy- Integral control method, and get better control effect through experiment. The micromanipulator performance indicators are obtained through the static and dynamic tests on the micromanipulator: the maximum output displacement of X and Y axes at the operator’s hand is ± 8.5μm, the repeat positioning accuracy is 28nm, the displacement resolution is 10nm, the dynamic step The response time is 5 ms; the maximum output displacement of Z axis is 6. 2 μm, the repetitive positioning accuracy is 17 nm, the displacement resolution is 4 nm and the dynamic step response time is 5 ms. The micromanipulator can achieve nanometer micro-positioning, to meet the micro-operation requirements