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传统原子力显微镜(AFM)在接触模式下工作时具有接触力较大、易损伤样品的缺点.本文通过对新型自感应音叉探针施加双频激励,使得AFM工作在轻敲模式下,减小了接触力和扫描过程中的侧向力影响,实现了样品表面力学特性和亚表面结构的表征.然后利用基于DSP的PI反馈控制模块,完成了线扫描实验,证明该双频原子力显微测量系统具有较好的测量能力.
The traditional atomic force microscope (AFM) has the disadvantage of large contact force and easy to damage the sample when it works in the contact mode.In this paper, by applying dual-frequency excitation to the new self-sensing tuning fork probe, the AFM works in tapping mode, Contact force and the influence of lateral force in the process of scanning to realize the surface mechanical properties and subsurface structure characterization of the sample.And then using the PI feedback control module based on DSP to complete the line scanning experiment to prove that the dual-frequency atomic force microscopy measurement system Has a good measurement capability.