随着超精加上表面质量的不断提高,对表面微观形貌的测量技术的要求也越来越高。本文介绍了非接触光学评测技术中的光聚焦检测法。其具有高速、高分辨率、在线测量以及仪器小型化等优点。有着广泛的应用领域。 With the continuous improvement of superficial surface quality, the requirements for surface micro-topography measurement technology are also getting higher and higher. This article describes the non-contact optical evaluation techniques in the optical focus detection method. It has the advantages of high speed, high resolution, on-line measurement and miniaturization of instruments. Has a wide range of applications.