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分析了电力静电感应晶闸管的主要电参数与器件结构的关系,结合制管经验进行了100 A/1 200 V 器件的结构( 版图) 设计、工艺设计,给出了有关结果.
The relationship between the main electrical parameters of the electrostatic induction thyristor and the structure of the device is analyzed. The structure (layout) design and process design of the 100 A / 1 200 V device are combined with the manufacturing experience. The relevant results are given.