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通过对波长808nm的GaA lAs/GaAs半导体功率放大激光器端面镀SiO减反射膜工艺过程,从理论和实验上分析了其涂层特性,透射率由无膜时的69%和32.6%提高到镀膜后的90%和80%以上,提高器件的耦合效率、输出光功率和工作寿命。
By coating the surface of GaAlAs / GaAs semiconductor laser power amplifier with 808nm wavelength on the anti-reflection coating, the coating properties were theoretically and experimentally analyzed. The transmittance increased from 69% and 32.6% Of 90% and 80%, improve the device coupling efficiency, output optical power and working life.