【摘 要】
：
针对大口径高通量实验平台面朝上反射镜表面发生的颗粒污染物沉积和损伤现象,提出了一种基于在线监测系统的在线洁净控制方法.通过搭建风刀系统实现了反射镜表面颗粒污染物在
【机 构】
：
中国工程物理研究院激光聚变研究中心
论文部分内容阅读
针对大口径高通量实验平台面朝上反射镜表面发生的颗粒污染物沉积和损伤现象,提出了一种基于在线监测系统的在线洁净控制方法.通过搭建风刀系统实现了反射镜表面颗粒污染物在线有效洁净处理,利用风帘实现了反射镜表面颗粒污染物在线有效洁净维持,采用图像处理系统快速地实现了在线洁净处理效果的准确评估.实验结果表明,采用风刀吹扫能够减少元件表面颗粒污染物,使用风帘可以有效阻滞颗粒污染物沉降,可应用于反射镜在线洁净维持.
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