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本文所介绍的高精度测量、高分辨力的定位控制传感器是一种柔性接触定位系统,由光学、电感、和电子器件等各部分组成,集当代一些高新技术一体的高新科技器件。其定位分辨力,优于0.005um.可供高精度位移(或长度)测量仪器设计中选用。
The high-precision measurement and high-resolution positioning control sensor introduced in this paper is a flexible contact positioning system. It consists of optical, inductive and electronic devices and other components. It combines high-tech devices with high-tech in the contemporary era. Its positioning resolution, better than 0.005um. Available for high-precision displacement (or length) measurement instrument design.