一、引言球面栅作为阻滞型能量分析器,在早期的逆电位型俄歇电子谱仪(AES)中曾起过重要作用。尽管当前的俄歇电子谱仪中都采用了筒镜分析器和半球形能量分析器,但是在Germer型LEED装置和出现电势谱的一个重要分支—消隐电势谱(DAPS)中,球面栅仍然起着分选电子能量的重要作用。因此,球面栅的制造还是一个值得重视的重要工艺。由于球面栅既要求具有良好的电子透过性又要求获得均匀的电场,所以它必须用极细的金属丝密织而成。据目前公布的资料来看,镀金的Mo丝组成100目栅网,其透过率为85％, I. INTRODUCTION As a retarding energy analyzer, the spherical grating has played an important role in the early inverse Auger electron spectroscopy (AES). Although the current Auger spectrometers use both a cylinder analyzer and a hemispherical energy analyzer, in the Germer-type LEED device and one of the major branches of the emerging electrical potential spectrum (DAPS), the sphere grid is still Plays an important role in sorting electronic energy. Therefore, the manufacture of spherical grid is still an important process worthy of attention. Since the spherical grid requires both good electron transmission and uniform electric field, it must be made of very thin metal wire. According to the current published data, the gold-plated Mo wire composed of 100 mesh grid, the transmission rate of 85%