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本文介绍氦质谱检漏仪在大型超高真空容器研制和总装调试中的应用。介绍质谱检漏仪检漏时“使用灵敏度”,以及检漏时“反应时间”。介绍KM_4超高真空宇宙模拟室部件和总装调试的检漏方法。
This article describes the helium mass spectrometer leak detector in the development of large ultra-high vacuum container and assembly of debugging applications. Describes the “use sensitivity” of the leak detector of the mass spectrometer and the “reaction time” of the leak detector. Introduce the testing method of KM_4 ultra-high vacuum cosmic simulation room components and assembly debugging.